Z-Axis Precision Manipulator, Stainless Steel
  • Order number: 420MZA100-150
  • Recirculating ball guidance system and recirculating ball screw drive
  • Zero-backlash and no slip-stick effect
  • Guidance and drive are wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • Fixing brake prevents independent movement
  • Connection flange with through holes, traversable flange with threaded holes
  • Adjustable zero set point
  • Options: custom travel range, bellows with an increased number of cycles, spindle tolerance class IT3 or IT1 (standard IT5), kit for converting to motorized drive, FEM-analysis for custom load, external bellows guidance
  • Delivery time: On request
Resolution5 µm
Bakeout temperature230 °C
Bellows guidance necessaryNo
Operating temperature-15 to 80 °C
Tightness< 1 · 10-11 Pa m³/s
Pressure range1 · 10-10 hPa to ambient pressure
Mounting orientationAny
Travel range150 mm
Inner diameterDN 40: 38 mm; DN 63: 65 mm; DN 100: 102 mm
MaterialStainless steel (bellows: 316L, flange and tube: 304L, housing: 304)
Nominal diameterDN 100 CF
Pitch of the ball screw drive2 mm/rotation
Repeatable precision5 µm
A190 – 340 mm
B460 mm
C176 mm
D267 mm
E91 mm
F104 mm