SVV 063 HF, UHV Schieber
  • Order number: PF F61 031
  • Metal-sealed stainless steel housing
  • Vulcanized, cavity-free valve disk seal
  • Bellows-sealed
  • Lubricant-free mechanics
  • High conductance due to free clearance
  • Service life: 50000 operating cycles
  • Delivery time: 1-3 days
ActuatorHand wheel
Bakeout temperature: Valve open, under vacuum250 °C
Bakeout temperature: Valve closed200 °C
Tightness: Housing5 · 10-11 Pa m³/s
Tightness: Valve seat1 · 10-10 Pa m³/s
Seal: HousingMetal
Seal: Valve seatFKM
Differential pressure in opening direction1600 hPa
Differential pressure in closing direction1600 hPa
Pressure max. (absolute)1600 hPa
Pressure min.1 · 10-10 hPa
HousingStainless steel
Weight9 kg
Conductance for molecular flow600 l/s
Nominal diameterDN 63 CF-F
Opens to a pressure difference of30 hPa
Service life50000 cycles
TypeUHV gate valve
Valve plateStainless steel