SVV 063 HF, UHV Schieber
- Metal-sealed stainless steel housing
- Vulcanized, cavity-free valve disk seal
- Bellows-sealed
- Lubricant-free mechanics
- High conductance due to free clearance
- Service life: 50000 operating cycles
-
Order number:
PF F61 031
- Metal-sealed stainless steel housing
- Vulcanized, cavity-free valve disk seal
- Bellows-sealed
- Lubricant-free mechanics
- High conductance due to free clearance
- Service life: 50000 operating cycles
-
Delivery time:
On request
| Actuator |
|
|---|
| Bakeout temperature: valve open, under vacuum |
250 °C
|
|---|
| Bakeout temperature: valve closed |
200 °C
|
|---|
| Tightness: Housing |
5 · 10-11 Pa m³/s
|
|---|
| Tightness: Valve seat |
1 · 10-10 Pa m³/s
|
|---|
| Seal: Housing |
Metal
|
|---|
| Seal: Valve seat |
FKM
|
|---|
| Differential pressure in opening direction |
1600 hPa
|
|---|
| Differential pressure in closing direction |
1600 hPa
|
|---|
| Pressure max. (absolute) |
1600 hPa
|
|---|
| Pressure min. |
1 · 10-10 hPa
|
|---|
| Feedthrough |
Bellows
|
|---|
| Housing |
Stainless steel
|
|---|
| Weight |
9 kg
|
|---|
| Conductance value with molecular flow |
600 l/s
|
|---|
| Nominal diameter |
DN 63 CF-F
|
|---|
| Opens against differential pressure of |
30 hPa
|
|---|
| Service life |
50000 cycles
|
|---|
| Type |
UHV gate valve
|
|---|
| Valve plate |
Stainless steel
|
|---|
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