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All-metal gas dosing valve
- Suitable for UHV applications
- Minimum dead volume
- Operating temperature up to 300 °C
- For mass spectrometer applications
- Gas inlet DN 16 CF-R
- Order number: 420VED016
- Suitable for UHV applications
- Minimum dead volume
- Operating temperature up to 300 °C
- For mass spectrometer applications
- Gas inlet DN 16 CF-R
- Delivery time: 1-3 days
| Connection flange | DN 16 CF-R |
|---|---|
| Connection flange (out) | DN 16 CF-R |
| Actuator |
|
| Bakeout temperature max. | ≤ 300 °C |
| Operating pressure | 1 · 10-10 hPa to 1500 hPa (abs.) |
| Tightness | 1 · 10-11 Pa m³/s |
| Pressure max. | 10000 hPa |
| Pressure min. | 1 · 10-11 hPa |
| Inlet pressure max. | 1 · 10-10 hPa – 1 MP |
| Max. controllable gas flow | 5 · 102 hPa·l/s |
| Min. controllable gas flow | 1 · 10-10 hPa·l/s |
| Housing |
|
| Weight | 0.94 kg |
| Conductance value with molecular flow | 0.05 l/s |
| Type | Gas control valve |
