• Order number: 420MZF016-025-m
  • Hermetically sealed, suitable for UHV
  • Bellows-sealed
  • For motorized fine positioning of components in the vacuum
  • Easy bake-out with comfortable motor disassembly and position fixing device
  • Delivery time: 1-3 days
Resolution0.1 µm
Bakeout temperature with electric parts70 °C
Bakeout temperature without electric parts200 °C
Axial forcemax. 45 N
FasteningScrews M4 x 5 (on actuator)
Operating temperature≤ 65 °C
Pressure range1 · 10-9 hPa to 500 hPa over pressure
Precision3 µm
Stroke25 mm
Maximum load torque at bellows0.2 N m
Motor type2-ph stepping motor
Nominal diameterDN 16 CF
Service life10000 cycles
Path25 mm