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Connection flange | DN 40 CF |
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Resolution | 5 µm |
Bakeout temperature max. | ≤ 230 °C |
Operating temperature | -15 – 80 °C |
Tightness | < 1 · 10-11 Pa m³/s |
Pressure range | 1E-10 hPa – to ambient pressure |
Mounting orientation | Arbitrary |
Precision | < 5 µm |
Weight | 4 kg |
Inner diameter | 38 mm |
Material | Bellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: aluminum anodized |
Maximum allowable payload | 50 kg |
Service life | 10000 cycles |
Repeatable precision | < 5 µm |
X/Y-deflection | ± 12.5 mm |
mm | |
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A | 154 |
B | 270 |
C | 270 |
D | 130 |