Connection flange |
DN 63 CF
|
Resolution |
1.25 µm
|
Bakeout temperature with electric parts |
80 °C
|
Bakeout temperature without electric parts |
230 °C
|
Operating temperature |
-10 – 50 °C
|
Tightness |
< 1 · 10-11 Pa m³/s
|
Pressure range |
1E-10 hPa – to ambient pressure
|
Mounting orientation |
Arbitrary
|
Precision |
< 3 µm
|
Weight |
15.5 kg
|
Inner diameter |
65 mm
|
Material |
Bellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: aluminum anodized
|
Maximum allowable payload |
75 kg
|
Motor rating |
48 V DC (standard), 120 V DC (max.); max. 4 A/Phase bipolar parallel
|
Motor type |
2-ph stepping motor
|
Service life |
10000 cycles
|
Repeatable precision |
1.25 µm (at half motor step)
|
X/Y-deflection |
± 25 mm
|