Resolution | 1.25 µm |
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Bakeout temperature with electric parts | 80 °C |
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Bakeout temperature without electric parts | 230 °C |
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Tightness | < 1 · 10-11 Pa m³/s |
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Pressure range | 1 · 10-10 hPa to ambient pressure |
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Mounting orientation | Any |
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Precision | < 3 µm |
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Weight | 15.5 kg |
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Inner diameter | DN 63: 65 mm, DN 100: 102 mm |
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Material | Bellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: aluminum anodized |
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Maximum allowable payload | 75 kg |
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Motor rating | 48 V DC (standard), 120 V DC (max.); max. 4 A/Phase bipolar parallel |
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Motor type | 2-ph motor |
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Nominal diameter | DN 63 CF |
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Service life | Min. 10.000 cycles at full deflection (bellows easy replace) |
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Repeatable precision | 1.25 µm (at half motor step) |
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X/Y-deflection | ± 25 mm |