XY-Achsen Präzisionsmanipulator, motorisiert, Edelstahl
  • Order number: 420MXY063-25-m
  • Precision cross roller guides
  • Zero-backlash and no slip-stick effect
  • Guidance and drive wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • Maximum x and y travel fully usable simultaneously
  • Connection flange with through holes, traversable flange with threaded holes
  • End switches fully adjustable
  • Delivery time: 1-3 days
Resolution1.25 µm
Bakeout temperature with electric parts80 °C
Bakeout temperature without electric parts230 °C
Operating temperature-10 – 50 °C
Tightness< 1 · 10-11 Pa m³/s
Pressure range1 · 10-10 hPa to ambient pressure
Mounting orientationArbitrary
Precision< 3 µm
Weight15.5 kg
Inner diameterDN 63: 65 mm, DN 100: 102 mm
MaterialBellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: aluminum anodized
Maximum allowable payload75 kg
Motor rating48 V DC (standard), 120 V DC (max.); max. 4 A/Phase bipolar parallel
Motor type2-ph stepping motor
Nominal diameterDN 63 CF
Service lifeMin. 10.000 cycles at full deflection (bellows easy replace)
Repeatable precision1.25 µm (at half motor step)
X/Y-deflection± 25 mm