XY-Axis precision manipulator, stainless steel
  • Order number: 420MXYZ040-300
  • Compact design for precise 3-axis manipulation
  • Z-axis: Recirculating ball bearing guides and recirculating ball screw drive
  • XY-axis: precision cross roller guides
  • Zero backlash and no slip-stick effect
  • Guide and drive are wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • XY-axis micrometer screws with big knobs - easy to handle and easy to read
  • Brake for z-axis prevents independent movement
  • Connection flange with through holes, traversable flange with threaded holes
  • Delivery time: On request
€10,170.00
Connection flange DN 40 CF
Resolution 5 µm
Bakeout temperature max. ≤ 230 °C
Operating temperature -15 – 80 °C
Tightness < 1 · 10-11 Pa m³/s
Pressure range 1E-10 hPa – to ambient pressure
Mounting orientation Arbitrary
Precision < 5 µm (XY-axis)
Stroke 300 mm
Inner diameter 38 mm
Material Bellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: stainless steel 304, XY-unit: aluminum anodized
Service life 10000 cycles
Pitch of ball screw drive 2 mm/Rotation
Repeatable precision 5 µm
X/Y-deflection ± 12.5 mm
Dimension Image
A 250 – 550 mm
B 640 mm
C 82 mm
D 321 mm
E 63.5 mm
F 232 mm