UHV inline valve, DN 63 CF, manual, SS/Cu/FKM, "A"-dim. 210 mm
- Copper-sealed for UHV service
- Stainless steel body with welded diaphragm bellows
- Conductance continuously variable with handwheel (multi-turn)
- Fully retracting and opening
- Additional O-ring materials available
-
Order number:
CAIV-S06400
- Copper-sealed for UHV service
- Stainless steel body with welded diaphragm bellows
- Conductance continuously variable with handwheel (multi-turn)
- Fully retracting and opening
- Additional O-ring materials available
-
Delivery time:
4 weeks
Connection flange |
DN 63 CF
|
Actuator |
|
Bakeout temperature: actuator |
60 °C
|
Bakeout temperature: housing |
150 °C
|
Operating pressure min. |
1 · 10-9 hPa
|
Tightness |
1 · 10-10 mbar l/s
|
Tightness: Housing |
1 · 10-10 mbar l/s
|
Seal: Housing |
Copper
|
Seal: Valve plate |
FKM
|
Differential pressure in opening direction |
1400 hPa
|
Differential pressure in closing direction |
1400 hPa
|
Pressure max. (absolute) |
1000 hPa
|
Feedthrough |
|
Housing |
|
Weight |
3 kg
|
Conductance value with molecular flow |
83 l/s
|
Service life |
100000 cycles
|
Type |
UHV Inline Valve
|
|
mm |
A |
210
|
B |
178
|
C |
84
|
D |
117
|
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