UHV inline valve, DN 63 CF, manual, SS/Cu/FKM, "A"-dim. 210 mm
  • Order number: CAIV-S06400
  • Copper-sealed for UHV service
  • Stainless steel body with welded diaphragm bellows
  • Conductance continuously variable with handwheel (multi-turn)
  • Fully retracting and opening
  • Additional O-ring materials available
  • Delivery time: 4 weeks
€970.00
Connection flange DN 63 CF
Actuator
  • Spindle
  • Handwheel
Bakeout temperature: actuator 60 °C
Bakeout temperature: housing 150 °C
Operating pressure min. 1 · 10-9 hPa
Tightness 1 · 10-10 mbar l/s
Tightness: Housing 1 · 10-10 mbar l/s
Seal: Housing Copper
Seal: Valve plate FKM
Differential pressure in opening direction 1400 hPa
Differential pressure in closing direction 1400 hPa
Pressure max. (absolute) 1000 hPa
Feedthrough
  • Bellows
  • Stainless steel
Housing
  • Stainless steel
Weight 3 kg
Conductance value with molecular flow 83 l/s
Service life 100000 cycles
Type UHV Inline Valve
Dimension Image
mm
A 210
B 178
C 84
D 117