XY-Axis precision manipulator, motorized, stainless steel
  • Order number: 420MXY100-25-m
  • Precision cross roller guide
  • Zero-backlash and no slip-stick effect
  • Guidance and drive wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • Maximum x and y travel fully usable simultaneously
  • Connection flange with through holes, traversable flange with threaded holes
  • End switches fully adjustable
  • Delivery time: On request
Resolution 1.25 µm
Bakeout temperature with electric parts 80 °C
Bakeout temperature without electric parts 230 °C
Operating temperature -10 – 50 °C
Tightness < 1 · 10-11 Pa m³/s
Pressure range 1E-10 hPa – to ambient pressure
Mounting orientation Arbitrary
Precision < 3 µm
Weight 22.5 kg
Inner diameter 102 mm
Material Bellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: aluminum anodized
Maximum allowable payload 100 kg
Motor rating 48 V DC (standard), 120 V DC (max.); max. 4 A/Phase bipolar parallel
Motor type 2-ph stepping motor
Nominal diameter DN 100 CF
Service life 10000 cycles
Repeatable precision 1.25 µm (at half motor step)
X/Y-deflection ± 25 mm
Dimension Image
A 254
B 423
C 437
D 210