Resolution |
1.25 µm
|
Bakeout temperature with electric parts |
80 °C
|
Bakeout temperature without electric parts |
230 °C
|
Operating temperature |
-10 – 50 °C
|
Tightness |
< 1 · 10-11 Pa m³/s
|
Pressure range |
1 · 10-10 hPa to ambient pressure
|
Mounting orientation |
Arbitrary
|
Precision |
< 3 µm
|
Weight |
22.5 kg
|
Inner diameter |
DN 63: 65 mm, DN 100: 102 mm
|
Material |
Bellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: aluminum anodized
|
Maximum allowable payload |
100 kg
|
Motor rating |
48 V DC (standard), 120 V DC (max.); max. 4 A/Phase bipolar parallel
|
Motor type |
2-ph stepping motor
|
Nominal diameter |
DN 100 CF
|
Service life |
Min. 10.000 cycles at full deflection (bellows easy replace)
|
Repeatable precision |
1.25 µm (at half motor step)
|
X/Y-deflection |
± 25 mm
|