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| Connection flange | DN 40 CF-R |
|---|---|
| Actuator | Micrometer screw |
| Scale division | 5 µm |
| Bakeout temperature: feedthrough max. | 300 °C |
| Bakeout temperature: micrometer screw/piston max. | 100 °C |
| Load capacity radial: at max. stroke | 100 N |
| Load capacity: torsion | 0.5 nm |
| Mode of operation | Micrometer screw |
| Operating temperature | ≤ 50 °C |
| Tightness | 1 · 10-11 Pa m³/s |
| Pressure range | 1E-9 hPa – 500 hPa over pressure |
| Feedthrough | Bellows |
| Mounting orientation | Arbitrary |
| Precision | 5 µm |
| Weight | 1 kg |
| Stroke | 50 mm |
| Stroke per revolution | 1 mm |
| Materials in contact with media | Stainless steel |
| Service life | 10000 cycles |
| Shaft connection | M6 x 10 mm / ø 10 mm |
| Shaft load, axial: against atmosphere | 500 N |
| Shaft load, axial: against vacuum | 440 N |