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XYZ-Axis Precision Manipulator

Product description

  • Compact design for precise 3-axis manipulation
  • Z-axis: Recirculating ball bearing guides and recirculating ball screw drive
  • XY-axis: precision cross roller guides
  • Zero backlash and no slip-stick effect
  • Guide and drive are wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • XY-axis micrometer screws with big knobs - easy to handle and easy to read
  • Brake for Z-axis prevents independent movement
  • Connection flange with through holes, traversable flange with threaded holes

Die Filterung ergab Treffer

Technical Data

  • Resolution: 5 µm
  • Bakeout temperature max.: ≤ 230 °C
  • Operating temperature: -15 – 80 °C
  • Tightness: < 1 · 10-11 Pa m³/s
  • Pressure range: 1E-10 hPa – to ambient pressure
  • Mounting orientation: Arbitrary
  • Precision: < 5 µm (XY-axis)
  • Inner diameter: 38 mm
  • Material: Bellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: stainless steel 304, XY-unit: aluminum anodized
  • Service life: 10000 cycles
  • Pitch of ball screw drive: 2 mm/Rotation
  • Repeatable precision: 5 µm
€9,450.00
€9,680.00
€9,775.00
€10,170.00
€10,580.00