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Connection flange | DN 25 ISO-KF |
---|---|
Actuator | Spindle |
Bakeout temperature: actuator | 50 °C |
Bakeout temperature: housing | 100 °C |
Tightness | 1 · 10-10 Pa m³/s |
Seal: Valve plate | FKM |
Pressure range | 1E-7 hPa – 5E3 hPa |
Mounting orientation | Arbitrary |
Housing | Aluminum |
Conductance value | 5 l/s |
Conductance value with molecular flow | 5 l/s |
Type | Diaphragm valve |
mm | |
---|---|
A | 80 |
B | 111 |