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| Connection flange | DN 63 ISO-K |
|---|---|
| Heat up and cool down rate | ≤ 25 K/min |
| Tightness | 1 · 10-11 Pa m³/s |
| Pressure range | 1 · 10-8 hPa – ambient pressure |
| Feedthrough voltage | 500 V DC |
| Materials in contact with media |
Flange: Stainless steel Pins: Nickel-Iron alloy, gold plated Insulator: Ceramic |
| Pins | 25 |
| Current | 5 A |
| Current per pin | 5 A |
| Current, total | 25 A |
| Temperature range (vacuum side) | -100 – 300 °C |