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Heat up and cool down rate | max. 25 K/min |
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Tightness | 1 · 10-11 Pa m³/s |
Pressure range | 1 · 10-8 hPa to ambient pressure |
Material | Flange: stainless steel; pins: stainless steel (gold-plated) |
Nominal diameter | DN 63 ISO-K |
Pins | 25 |
Voltage | 500 V DC |
Current | 5 A per pin |
Temperature range (vacuum side) | -100 – 300 °C |