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Actuator |
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Resolution | 10 µm |
Bakeout temperature: feedthrough max. | 300 °C |
Bakeout temperature: micrometer screw/piston max. | 100 °C |
Axial force | 50 N (max.) |
Fastening | Screws M4 x 5 screw (on the punch) |
Mode of operation | Micrometer screw |
Operating temperature | ≤ 50 °C |
Tightness | 1 · 10-11 Pa m³/s |
Pressure range | 1 · 10-9 hPa to 500 hPa over pressure |
Mounting orientation | Arbitrary |
Precision | 10 µm |
Stroke | 25 mm |
Material | Stainless steel |
Nominal diameter | DN 16 CF |
Service life | 10000 cycles |