0 part(s), total €0.00
Actuator |
|
---|---|
Resolution | 0.5 µm |
Bakeout temperature: feedthrough max. | 300 °C |
Bakeout temperature: micrometer screw/piston max. | 100 °C |
Mode of operation | Micrometer screw |
Operating temperature | ≤ 50 °C |
Tightness | 1 · 10-11 Pa m³/s |
Pressure range | 1 · 10-9 hPa to 500 hPa over pressure |
Mounting orientation | Arbitrary |
Precision | 3 µm |
Stroke | 10 mm |
Material | Stainless steel |
Nominal diameter | DN 16 CF |
Service life | 10000 cycles |