0 part(s), total €0.00
| Connection flange | DN 16 CF |
|---|---|
| Resolution | 0.1 µm |
| Bakeout temperature with electric parts | 70 °C |
| Bakeout temperature without electric parts | 200 °C |
| Axial force | ≤ 45 N |
| Fastening | Screws M4 x 5 (on actuator) |
| Operating temperature | ≤ 65 °C |
| Pressure range | 1E-9 hPa – 5E2 hPa over pressure |
| Precision | 3 µm |
| Stroke | 25 mm |
| Maximum load torque at bellows | 0.2 Nm |
| Motor type | 2-ph stepping motor |
| Service life | 10000 cycles |