Connection flange |
DN 40 CF
|
Resolution |
1.25 µm (at 1/8 motor step)
|
Bakeout temperature with electric parts |
80 °C
|
Bakeout temperature without electric parts |
230 °C
|
Bellows guidance necessary |
No
|
Operating temperature |
-10 – 50 °C
|
Tightness |
< 1 · 10-11 Pa m³/s
|
Pressure range |
1E-10 hPa – to ambient pressure
|
Mounting orientation |
Arbitrary
|
Stroke |
150 mm
|
Inner diameter |
38 mm
|
Power consumption |
Motor: 4.8 V DC; max. 2.8 A/phase bipolar parallel; brake: 24 V DC, 0.5 A
|
Material |
Stainless steel (bellows: 316L, flange and tube 304L, housing 304)
|
Maximum allowable payload |
25 kg
|
Motor type |
2-ph stepping motor
|
Service life |
10000 cycles
|
Pitch of ball screw drive |
2 mm/Rotation
|
Repeatable precision |
1.25 µm (at 1/8 motor step)
|