Z-Achsen Präzisionsmanipulator motorisiert, Edelstahl
  • Order number: 420MZA063-400-m
  • Recirculating ball guidance system and recirculating ball screw drive
  • Zero-backlash and no slip-stick effect
  • Guidance and drive are wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • End switches fully adjustable
  • Fixing brake (currentless closed) prevents independent movement
  • Connection flange with through holes, traversable flange with threaded holes
  • Delivery time: On request
€9,460.00
Resolution1.25 µm (at 1/8 motor step)
Bakeout temperature with electric parts80 °C
Bakeout temperature without electric parts230 °C
Bellows guidance necessaryYes, for movement without vacuum
Tightness< 1 · 10-11 Pa m³/s
Pressure range1 · 10-10 hPa to ambient pressure
Mounting orientationAny
Stroke400 mm
Inner diameterDN 40: 38 mm; DN 63: 65 mm; DN 100: 102 mm
Power consumptionMotor: 4.8 V DC; max. 2.8 A/phase bipolar parallel; brake: 24 V DC, 0.5 A
MaterialStainless steel (bellows: 316L, flange and tube: 304L, housing: 304)
Motor type2-ph motor
Nominal diameterDN 63 CF
Service lifeMin. 10.000 cycles at full deflection (bellows easy replace)
Pitch of ball screw drive2 mm/rotation
Repeatable precision1.25 µm (at 1/8 motor step)
A220 – 620 mm
B680 mm
C128 mm
D293 mm
E70 mm
F104 mm