| Connection flange |
DN 100 CF
|
| Resolution |
1.25 µm (at 1/8 motor step)
|
| Bakeout temperature with electric parts |
80 °C
|
| Bakeout temperature without electric parts |
230 °C
|
| Bellows guidance necessary |
No
|
| Operating temperature |
-10 – 50 °C
|
| Tightness |
< 1 · 10-11 Pa m³/s
|
| Pressure range |
1E-10 hPa – to ambient pressure
|
| Mounting orientation |
Arbitrary
|
| Stroke |
200 mm
|
| Inner diameter |
102 mm
|
| Material |
Stainless steel (bellows: 316L, flange and tube 304L, housing 304)
|
| Maximum allowable payload |
25 kg
|
| Motor rating |
Motor, 4.8 V DC, max. 2.8 A/phase bipolar parallel
|
| Motor type |
2-ph stepping motor
|
| Service life |
10000 cycles
|
| Pitch of ball screw drive |
2 mm/Rotation
|
| Repeatable precision |
1.25 µm (at 1/8 motor step)
|