Resolution | 1.25 µm (at 1/8 motor step) |
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Bakeout temperature with electric parts | 80 °C |
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Bakeout temperature without electric parts | 230 °C |
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Bellows guidance necessary | No |
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Tightness | < 1 · 10-11 Pa m³/s |
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Pressure range | 1 · 10-10 hPa to ambient pressure |
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Mounting orientation | Any |
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Stroke | 300 mm |
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Inner diameter | DN 40: 38 mm; DN 63: 65 mm; DN 100: 102 mm |
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Power consumption | Motor: 4.8 V DC; max. 2.8 A/phase bipolar parallel; brake: 24 V DC, 0.5 A |
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Material | Stainless steel (bellows: 316L, flange and tube: 304L, housing: 304) |
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Motor type | 2-ph motor |
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Nominal diameter | DN 100 CF |
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Service life | Min. 10.000 cycles at full deflection (bellows easy replace) |
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Pitch of ball screw drive | 2 mm/rotation |
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Repeatable precision | 1.25 µm (at 1/8 motor step) |