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Connection flange | DN 100 CF |
---|---|
Resolution | 2 µm |
Bakeout temperature max. | ≤ 230 °C |
Operating temperature | -15 – 80 °C |
Tightness | < 1 · 10-11 Pa m³/s |
Pressure range | 1E-10 hPa – to ambient pressure |
Mounting orientation | Arbitrary |
Precision | < 3 µm |
Weight | 18 kg |
Inner diameter | 102 mm |
Material | Bellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: aluminum anodized |
Maximum allowable payload | 100 kg |
Service life | 10000 cycles |
Repeatable precision | < 3 µm |
X/Y-deflection | ± 25 mm |
mm | |
---|---|
A | 254 |
B | 394 |
C | 406 |
D | 210 |