0 part(s), total €0.00
| Connection flange | DN 100 CF |
|---|---|
| Resolution | 2 µm |
| Bakeout temperature max. | ≤ 230 °C |
| Operating temperature | -15 – 80 °C |
| Tightness | < 1 · 10-11 Pa m³/s |
| Pressure range | 1E-10 hPa – to ambient pressure |
| Mounting orientation | Arbitrary |
| Precision | < 3 µm |
| Weight | 18 kg |
| Inner diameter | 102 mm |
| Material | Bellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: aluminum anodized |
| Maximum allowable payload | 100 kg |
| Service life | 10000 cycles |
| Repeatable precision | < 3 µm |
| X/Y-deflection | ± 25 mm |
| mm | |
|---|---|
| A | 254 |
| B | 394 |
| C | 406 |
| D | 210 |