XY-Axis precision manipulator, stainless steel
  • Order number: 420MXYZ040-400
  • Compact design for precise 3-axis manipulation
  • Z-axis: recirculating ball bearing guides and ball screw drive
  • XY-axis: precision cross roller guides
  • Zero-backlash and no slip-stick effect
  • Guidance and drive wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • XY-axis micrometer screws with big knobs - easy to handle and easy to read
  • Brake for z-axis prevents independent movement
  • Connection flange with through holes, traversable flange with threaded holes
  • Delivery time: On request
€9,200.00
Resolution 5 µm
Bakeout temperature ≤ 230 °C
Operating temperature -15 – 80 °C
Tightness < 1 · 10-11 Pa m³/s
Pressure range 1 · 10-10 hPa to ambient pressure
Mounting orientation Arbitrary
Precision < 5 µm (XY-axis)
Stroke 400 mm
Inner diameter 38 mm
Material Bellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: stainless steel 304, XY-unit: aluminum anodized
Nominal diameter DN 40 CF
Service life Min. 10.000 cycles at full deflection (bellows easy replace)
Pitch of ball screw drive 2 mm/Rotation
Repeatable precision 5 µm
X/Y-deflection ± 12.5 mm
Dimension Image
A 280 – 680 mm
B 770 mm
C 82 mm
D 321 mm
E 63.5 mm
F 232 mm