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Screening | Grounded shield |
---|---|
Heat up and cool down rate | max. 25 K/min |
Remark | Detail drawing 2 |
Tightness | 1 · 10-11 Pa m³/s |
Pressure range | 1 · 10-11 hPa to ambient pressure |
Voltage | XSF-5 and XSG-5: 5 kV DC | XSG-10: 10 kV DC |
Current | 5 A |
Temperature range (vacuum side) | -100 – 300 °C |
mm | |
---|---|
A | 61 |
B | 9 |
C | 13 |