Z-Axis precision manipulator, stainless steel
  • Order number: 420MZA040-150
  • Recirculating ball guidance system and recirculating ball screw drive
  • Zero-backlash and no slip-stick effect
  • Guidance and drive are wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • Fixing brake prevents independent movement
  • Connection flange with through holes, traversable flange with threaded holes
  • Adjustable zero set point
  • Delivery time: On request
€5,600.00
Resolution 5 µm
Bakeout temperature ≤ 230 °C
Bellows guidance necessary No
Operating temperature -15 – 80 °C
Tightness < 1 · 10-11 Pa m³/s
Pressure range 1 · 10-10 hPa to ambient pressure
Mounting orientation Arbitrary
Stroke 150 mm
Inner diameter DN 40: 38 mm; DN 63: 65 mm | DN 100: 102 mm
Material Stainless steel (bellows: 316L, flange and tube: 304L, housing: 304)
Maximum allowable payload 20 kg
Nominal diameter DN 40 CF
Service life Min. 10.000 cycles at full deflection (bellows easy replace)
Pitch of ball screw drive 2 mm/Rotation
Repeatable precision 5 µm
Dimension Image
A 150 – 300 mm
B 420 mm
C 84 mm
D 175 mm
E 50 mm
F 82 mm