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Z-Axis Precision Manipulator
Product description
- Recirculating ball bearing guides and recirculating ball screw drive
- Zero backlash and no slip-stick effect
- Guide and drive are wear-free and maintenance-free
- Extremely stable design concept minimizes position offset due to pressure changes
- Fixing brake prevents independent movement
- Connection flange with through holes, traversable flange with threaded holes
- Adjustable zero set point
- Inner diameter: DN 40: 38 mm | DN 63: 65 mm | DN 100: 102 mm
- CF flanges in nominal sizes DN 16 to DN 250 according to ISO 3669
Subcategories
Die Filterung ergab Treffer
Technical Data
- Resolution: 5 µm
- Bakeout temperature max.: ≤ 230 °C
- Operating temperature: -15 – 80 °C
- Tightness: < 1 · 10-11 Pa m³/s
- Pressure range: 1E-10 hPa – to ambient pressure
- Mounting orientation: Arbitrary
- Material: Stainless steel (bellows: 316L, flange and tube 304L, housing 304)
- Service life: 10000 cycles
- Pitch of ball screw drive: 2 mm/Rotation
- Repeatable precision: 5 µm