Resolution |
5 µm
|
Bakeout temperature |
≤ 230 °C
|
Bellows guidance necessary |
Yes, for movement without vacuum
|
Operating temperature |
-15 – 80 °C
|
Tightness |
< 1 · 10-11 Pa m³/s
|
Pressure range |
1 · 10-10 hPa to ambient pressure
|
Mounting orientation |
Arbitrary
|
Stroke |
300 mm
|
Inner diameter |
DN 40: 38 mm; DN 63: 65 mm | DN 100: 102 mm
|
Material |
Stainless steel (bellows: 316L, flange and tube: 304L, housing: 304)
|
Maximum allowable payload |
20 kg
|
Nominal diameter |
DN 40 CF
|
Service life |
Min. 10.000 cycles at full deflection (bellows easy replace)
|
Pitch of ball screw drive |
2 mm/Rotation
|
Repeatable precision |
5 µm
|