| Connection flange |
DN 40 CF
|
| Resolution |
5 µm
|
| Bakeout temperature max. |
≤ 230 °C
|
| Bellows guidance necessary |
Yes, for movement without vacuum
|
| Operating temperature |
-15 – 80 °C
|
| Tightness |
< 1 · 10-11 Pa m³/s
|
| Pressure range |
1E-10 hPa – to ambient pressure
|
| Mounting orientation |
Arbitrary
|
| Stroke |
300 mm
|
| Inner diameter |
38 mm
|
| Material |
Stainless steel (bellows: 316L, flange and tube 304L, housing 304)
|
| Maximum allowable payload |
20 kg
|
| Service life |
10000 cycles
|
| Pitch of ball screw drive |
2 mm/Rotation
|
| Repeatable precision |
5 µm
|