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Connection flange | DN 40 CF |
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Resolution | 5 µm |
Bakeout temperature max. | ≤ 230 °C |
Bellows guidance necessary | Yes |
Operating temperature | -15 – 80 °C |
Tightness | < 1 · 10-11 Pa m³/s |
Pressure range | 1E-10 hPa – to ambient pressure |
Mounting orientation | Arbitrary |
Stroke | 400 mm |
Inner diameter | 38 mm |
Material | Stainless steel (bellows: 316L, flange and tube 304L, housing 304) |
Maximum allowable payload | 20 kg |
Service life | 10000 cycles |
Pitch of ball screw drive | 2 mm/Rotation |
Repeatable precision | 5 µm |
A | 220 – 620 mm |
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B | 740 mm |
C | 84 mm |
D | 175 mm |
E | 50 mm |
F | 82 mm |