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Resolution | 5 µm |
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Bakeout temperature | 230 °C |
Bellows guidance necessary | No |
Tightness | < 1 · 10-11 Pa m³/s |
Pressure range | 1 · 10-10 hPa to ambient pressure |
Mounting orientation | Any |
Stroke | 200 mm |
Inner diameter | DN 40: 38 mm; DN 63: 65 mm; DN 100: 102 mm |
Material | Stainless steel (bellows: 316L, flange and tube: 304L, housing: 304) |
Nominal diameter | DN 63 CF |
Service life | Min. 10.000 cycles at full deflection (bellows easy replace) |
Pitch of ball screw drive | 2 mm/rotation |
Repeatable precision | 5 µm |
A | 165 – 365 mm |
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B | 485 mm |
C | 128 mm |
D | 217 mm |
E | 70 mm |
F | 82 mm |