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Z-Axis precision manipulator, stainless steel
- Recirculating ball bearing guides and recirculating ball screw drive
- Zero backlash and no slip-stick effect
- Guide and drive are wear-free and maintenance-free
- Extremely stable design concept minimizes position offset due to pressure changes
- Fixing brake prevents independent movement
- Connection flange with through holes, traversable flange with threaded holes
- Adjustable zero set point
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420MZA063-200
- Recirculating ball bearing guides and recirculating ball screw drive
- Zero backlash and no slip-stick effect
- Guide and drive are wear-free and maintenance-free
- Extremely stable design concept minimizes position offset due to pressure changes
- Fixing brake prevents independent movement
- Connection flange with through holes, traversable flange with threaded holes
- Adjustable zero set point
- Delivery time: On request
Global-No. 2000041085
| Connection flange | DN 63 CF |
|---|---|
| Resolution | 5 µm |
| Bakeout temperature max. | ≤ 230 °C |
| Bellows guidance necessary | No |
| Operating temperature | -15 – 80 °C |
| Tightness | < 1 · 10-11 Pa m³/s |
| Pressure range | 1E-10 hPa – to ambient pressure |
| Mounting orientation | Arbitrary |
| Stroke | 200 mm |
| Inner diameter | 65 mm |
| Material | Stainless steel (bellows: 316L, flange and tube 304L, housing 304) |
| Maximum allowable payload | 20 kg |
| Service life | 10000 cycles |
| Pitch of ball screw drive | 2 mm/Rotation |
| Repeatable precision | 5 µm |
| mm | |
|---|---|
| A | 165 |
| A | 365 |
| B | 485 |
| C | 128 |
| D | 217 |
| E | 70 |
| F | 82 |