Z-Axis Precision Manipulator, Stainless Steel
  • Order number: 420MZA063-400
  • Recirculating ball guidance system and recirculating ball screw drive
  • Zero-backlash and no slip-stick effect
  • Guidance and drive are wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • Fixing brake prevents independent movement
  • Connection flange with through holes, traversable flange with threaded holes
  • Adjustable zero set point
  • Delivery time: On request
Resolution5 µm
Bakeout temperature230 °C
Bellows guidance necessaryYes, for movement without vacuum
Tightness< 1 · 10-11 Pa m³/s
Pressure range1 · 10-10 hPa to ambient pressure
Mounting orientationAny
Stroke400 mm
Inner diameterDN 40: 38 mm; DN 63: 65 mm; DN 100: 102 mm
MaterialStainless steel (bellows: 316L, flange and tube: 304L, housing: 304)
Nominal diameterDN 63 CF
Service lifeMin. 10.000 cycles at full deflection (bellows easy replace)
Pitch of ball screw drive2 mm/rotation
Repeatable precision5 µm
A220 – 620 mm
B740 mm
C128 mm
D217 mm
E70 mm
F82 mm