Resolution | 5 µm |
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Bakeout temperature | 230 °C |
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Bellows guidance necessary | Yes, for movement without vacuum |
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Tightness | < 1 · 10-11 Pa m³/s |
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Pressure range | 1 · 10-10 hPa to ambient pressure |
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Mounting orientation | Any |
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Stroke | 400 mm |
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Inner diameter | DN 40: 38 mm; DN 63: 65 mm; DN 100: 102 mm |
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Material | Stainless steel (bellows: 316L, flange and tube: 304L, housing: 304) |
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Nominal diameter | DN 63 CF |
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Service life | Min. 10.000 cycles at full deflection (bellows easy replace) |
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Pitch of ball screw drive | 2 mm/rotation |
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Repeatable precision | 5 µm |