Z-Axis precision manipulator, stainless steel
  • Order number: 420MZA100-300
  • Recirculating ball bearing guides and recirculating ball screw drive
  • Zero-backlash and no slip-stick effect
  • Guidance and drive are wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • Fixing brake prevents independent movement
  • Connection flange with through holes, traversable flange with threaded holes
  • Adjustable zero set point
  • Delivery time: On request
€9,240.00
Resolution 5 µm
Bakeout temperature max. ≤ 230 °C
Bellows guidance necessary No
Operating temperature -15 – 80 °C
Tightness < 1 · 10-11 Pa m³/s
Pressure range 1E-10 hPa – to ambient pressure
Mounting orientation Arbitrary
Stroke 300 mm
Inner diameter 102 mm
Material Stainless steel (bellows: 316L, flange and tube 304L, housing 304)
Maximum allowable payload 20 kg
Nominal diameter DN 100 CF
Service life 10000 cycles
Pitch of ball screw drive 2 mm/Rotation
Repeatable precision 5 µm
Dimension Image
A 190 – 490 mm
B 610 mm
C 176 mm
D 267 mm
E 91 mm
F 104 mm