0 part(s), total €0.00
Resolution | 5 µm |
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Bakeout temperature | 230 °C |
Bellows guidance necessary | No |
Tightness | < 1 · 10-11 Pa m³/s |
Pressure range | 1 · 10-10 hPa to ambient pressure |
Mounting orientation | Any |
Stroke | 300 mm |
Inner diameter | DN 40: 38 mm; DN 63: 65 mm; DN 100: 102 mm |
Material | Stainless steel (bellows: 316L, flange and tube: 304L, housing: 304) |
Nominal diameter | DN 100 CF |
Service life | Min. 10.000 cycles at full deflection (bellows easy replace) |
Pitch of ball screw drive | 2 mm/rotation |
Repeatable precision | 5 µm |
A | 190 – 490 mm |
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B | 610 mm |
C | 176 mm |
D | 267 mm |
E | 91 mm |
F | 104 mm |