0 part(s), total €0.00
Connection flange | DN 63 CF |
---|---|
Resolution | 2 µm |
Bakeout temperature max. | ≤ 230 °C |
Operating temperature | -15 – 80 °C |
Tightness | < 1 · 10-11 Pa m³/s |
Pressure range | 1E-10 hPa – to ambient pressure |
Mounting orientation | Arbitrary |
Precision | < 3 µm |
Weight | 11 kg |
Inner diameter | 65 mm |
Material | Bellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: aluminum anodized |
Maximum allowable payload | 75 kg |
Service life | 10000 cycles |
Repeatable precision | < 3 µm |
X/Y-deflection | ± 25 mm |
A | 204 mm |
---|---|
B | 371 mm |
C | 371 mm |
D | 184 mm |