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XY-Axis precision manipulator, stainless steel
- Compact design for precise 3-axis manipulation
- Z-axis: Recirculating ball bearing guides and recirculating ball screw drive
- XY-axis: precision cross roller guides
- Zero backlash and no slip-stick effect
- Guide and drive are wear-free and maintenance-free
- Extremely stable design concept minimizes position offset due to pressure changes
- XY-axis micrometer screws with big knobs - easy to handle and easy to read
- Brake for z-axis prevents independent movement
- Connection flange with through holes, traversable flange with threaded holes
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420MXYZ040-150
- Compact design for precise 3-axis manipulation
- Z-axis: Recirculating ball bearing guides and recirculating ball screw drive
- XY-axis: precision cross roller guides
- Zero backlash and no slip-stick effect
- Guide and drive are wear-free and maintenance-free
- Extremely stable design concept minimizes position offset due to pressure changes
- XY-axis micrometer screws with big knobs - easy to handle and easy to read
- Brake for z-axis prevents independent movement
- Connection flange with through holes, traversable flange with threaded holes
- Delivery time: On request
Global-No. 2000041060
| Connection flange | DN 40 CF |
|---|---|
| Resolution | 5 µm |
| Bakeout temperature max. | ≤ 230 °C |
| Operating temperature | -15 – 80 °C |
| Tightness | < 1 · 10-11 Pa m³/s |
| Pressure range | 1E-10 hPa – to ambient pressure |
| Mounting orientation | Arbitrary |
| Precision | < 5 µm (XY-axis) |
| Stroke | 150 mm |
| Inner diameter | 38 mm |
| Material | Bellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: stainless steel 304, XY-unit: aluminum anodized |
| Service life | 10000 cycles |
| Pitch of ball screw drive | 2 mm/Rotation |
| Repeatable precision | 5 µm |
| X/Y-deflection | ± 12.5 mm |
| mm | |
|---|---|
| A | 210 |
| A | 360 |
| B | 450 |
| C | 82 |
| D | 321 |
| E | 63.5 |
| F | 232 |