XY-Axis precision manipulator, stainless steel

Compact design for precise 3-axis manipulation
Z-axis: recirculating ball bearing guides and ball screw drive
XY-axis: precision cross roller guides
Zero-backlash and no slip-stick effect
Guidance and drive wear-free and maintenance-free
Extremely stable design concept minimizes position offset due to pressure changes
XY-axis micrometer screws with big knobs - easy to handle and easy to read
Brake for z-axis prevents independent movement
Connection flange with through holes, traversable flange with threaded holes

Order number: 420MXYZ040-150
Compact design for precise 3-axis manipulation
Z-axis: recirculating ball bearing guides and ball screw drive
XY-axis: precision cross roller guides
Zero-backlash and no slip-stick effect
Guidance and drive wear-free and maintenance-free
Extremely stable design concept minimizes position offset due to pressure changes
XY-axis micrometer screws with big knobs - easy to handle and easy to read
Brake for z-axis prevents independent movement
Connection flange with through holes, traversable flange with threaded holes
Delivery time: On request

Order number	Delivery time	Your price	Amount
420MXYZ040-150	On request	€9,680.00

Resolution	5 µm
Bakeout temperature	≤ 230 °C
Operating temperature	-15 – 80 °C
Tightness	< 1 · 10^-11 Pa m³/s
Pressure range	1 · 10^-10 hPa to ambient pressure
Mounting orientation	Arbitrary
Precision	< 5 µm (XY-axis)
Stroke	150 mm
Inner diameter	38 mm
Material	Bellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: stainless steel 304, XY-unit: aluminum anodized
Nominal diameter	DN 40 CF
Service life	Min. 10.000 cycles at full deflection (bellows easy replace)
Pitch of ball screw drive	2 mm/Rotation
Repeatable precision	5 µm
X/Y-deflection	± 12.5 mm