XYZ-Achsen Präzisionsmanipulator, Edelstahl
  • Order number: 420MXYZ040-150
  • Compact design for precise 3-axis manipulation
  • Z-axis: recirculating ball bearing guides and ball screw drive
  • XY-axis: precision cross roller guides
  • Zero-backlash and no slip-stick effect
  • Guidance and drive wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • XY-axis micrometer screws with big knobs - easy to handle and easy to read
  • Brake for z-axis prevents independent movement
  • Connection flange with through holes, traversable flange with threaded holes
  • Delivery time: On request
Resolution5 µm
Bakeout temperature≤ 230 °C
Operating temperature-15 – 80 °C
Tightness< 1 · 10-11 Pa m³/s
Pressure range1 · 10-10 hPa to ambient pressure
Mounting orientationArbitrary
Precision< 5 µm (XY-axis)
Stroke150 mm
Inner diameter38 mm
MaterialBellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: stainless steel 304, XY-unit: aluminum anodized
Nominal diameterDN 40 CF
Service lifeMin. 10.000 cycles at full deflection (bellows easy replace)
Pitch of ball screw drive2 mm/Rotation
Repeatable precision5 µm
X/Y-deflection± 12.5 mm
A210 – 360 mm
B450 mm
C82 mm
D321 mm
E63.5 mm
F232 mm